Portal de Periódicos da CAPES

The Interaction of Molten Silicon with Silicon Aluminum Oxynitrides

1980; Wiley; Volume: 63; Issue: 7-8 Linguagem: Inglês

10.1111/j.1151-2916.1980.tb10200.x

1551-2916

R. R. Wills, I. Sekercioglu, Dale E. Niesz,

Semiconductor materials and devices

Silicon aluminum oxynitride solid solutions (sialons) based on β‐Si 3 N 4 and Si 2 N 2 O behave differently in contact with molten sih'con. The Si 2 N 2 O‐based sialons convert to almost pure Si 3 N 4 , apparently through a two‐step decomposition and solution‐precipitation reaction, whereas the β‐Si 3 N 4 sialons are preferentially attacked at the grain boundaries. The composition of the grain‐boundary phase appears to control the rate of reaction.