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The energy distribution of sputtered particles at low bombarding energies

1984; Elsevier BV; Volume: 4; Issue: 3 Linguagem: Inglês

10.1016/0168-583x(84)90579-2

1872-9584

M. Urbassek,

Fusion materials and technologies

The transport equations for the ion sputtering of metal targets are solved in the PL-approximation. After a Laplace transform in the logarithmic energy variable, analytical solutions for the flux at the surface can be obtained. These are numerically Laplace inverted for the case of equal masses of projectile and target atoms and hard sphere interaction; the case of a power law scattering cross section dσ(T) = CT−1dT is covered in P1-approximation, too. At high bombarding ion energies, the solution recovers the asymptot for the distribution in energy E of sputtered particles; at low bombarding energies, however, the solution displays — for normally incident ions and perpendicularly emitted target atoms — a steeper spectrum. This is in accordance with measurement. Boundary conditions for a semi-infinite medium as well as for an infinite medium are applied; these show only negligible influence on the solution. Furthermore, a solution by way of BL-approximation is obtained, which confirms the above results.