The ESFET—An evaporated chemical-sensing field-effect transistor
1988; Elsevier BV; Volume: 31; Issue: 1 Linguagem: Inglês
10.1016/0038-1101(88)90084-6
ISSN1879-2405
Autores Tópico(s)Electrochemical sensors and biosensors
ResumoThe fabrication process and characteristics of the evaporated sensing field effect transistor are described. This is a new chemically sensitive semiconductor device utilizing evaporated thin film transistors without gate metal. Device response to pH changes and electrolyte ionic concentrations are reported.
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