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Photoluminescence of oxidized porous silicon under UV-light illumination

2004; Elsevier BV; Volume: 116; Issue: 1 Linguagem: Inglês

10.1016/j.mseb.2004.08.014

1873-4944

Yue Zhao, Deren Yang, Dongsheng Li, Minghua Jiang,

Semiconductor materials and devices

The blue emission resulting from the as-prepared and oxidized porous silicon (PS) was reported in this paper. After the oxidation in plasma enhanced chemical vapor deposition (PECVD) process, the blue emission intensity in photoluminescence (PL) spectra increased because it is believed that the blue emission came from defects in silicon dioxides. Under UV-light illumination, the stability of the blue emission of the N-type oxidized PS was improved due to oxidation.