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Effect of process parameters on the optical constants of thin metal films

2000; Wiley; Volume: 29; Issue: 3 Linguagem: Inglês

10.1002/(sici)1096-9918(200003)29

1096-9918

Harland G. Tompkins, Jeffrey H. Baker, Diana Convey,

Semiconductor materials and devices

Surface and Interface AnalysisVolume 29, Issue 3 p. 227-231 Research Article Effect of process parameters on the optical constants of thin metal films Harland G. Tompkins, Corresponding Author Harland G. Tompkins Motorola Labs, Physical Science Research Laboratories, Tempe, AZ 85284, USAMotorola Labs, Physical Science Research Laboratories, Tempe, AZ 85284, USASearch for more papers by this authorJeffrey H. Baker, Jeffrey H. Baker Motorola Labs, Physical Science Research Laboratories, Tempe, AZ 85284, USASearch for more papers by this authorDiana Convey, Diana Convey Motorola Labs, Physical Science Research Laboratories, Tempe, AZ 85284, USASearch for more papers by this author Harland G. Tompkins, Corresponding Author Harland G. Tompkins Motorola Labs, Physical Science Research Laboratories, Tempe, AZ 85284, USAMotorola Labs, Physical Science Research Laboratories, Tempe, AZ 85284, USASearch for more papers by this authorJeffrey H. Baker, Jeffrey H. Baker Motorola Labs, Physical Science Research Laboratories, Tempe, AZ 85284, USASearch for more papers by this authorDiana Convey, Diana Convey Motorola Labs, Physical Science Research Laboratories, Tempe, AZ 85284, USASearch for more papers by this author First published: 07 March 2000 https://doi.org/10.1002/(SICI)1096-9918(200003)29:3 3.0.CO;2-WCitations: 6AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onFacebookTwitterLinkedInRedditWechat Abstract In this study, we show that the optical constants of sputter-deposited chromium depend on the argon pressure used for the deposition. Higher argon pressure gives lower extinction coefficients. Sheet resistance measurements show that those materials with lower extinction coefficients also have lower conductivity. Whereas the argon pressure strongly affects the resulting optical constants of the film material, the choice of substrate material does not affect the resulting optical constants of the film. Copyright © 2000 John Wiley & Sons, Ltd. Citing Literature Volume29, Issue3Special Issue: Papers Presented at Surface Analysis '99March 2000Pages 227-231 RelatedInformation