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Fully Reconfigurable Silicon Photonic Lattice Filters With Four Cascaded Unit Cells

2010; Institute of Electrical and Electronics Engineers; Volume: 23; Issue: 1 Linguagem: Inglês

10.1109/lpt.2010.2090868

1941-0174

Stevan S. Djordjevic, Lian Wee Luo, Salah Ibrahim, Nicolas K. Fontaine, Carl B. Poitras, Binbin Guan, Linjie Zhou, Katsunari Okamoto, Zhi Ding, Michal Lipson, S. J. Ben Yoo,

Optical Network Technologies

We present a fully reconfigurable optical filter built by cascading four identical unit cells. The devices are fabricated using two distinct methods: a complementary metal-oxide-semiconductor (CMOS) compatible process utilizes deep ultraviolet (DUV) lithography with tuning elements defined by ion implantation to make lateral p-i-n diodes for current injection regions, while an electron beam (E-beam) lithography process uses nickel chrome (NiCr) heaters as tuning elements. The fabricated devices are characterized using swept optical vector network analyzer (OVNA) coherent measurements.