Normal incidence reflectance of ion beam deposited SiC films in the EUV
1988; Optica Publishing Group; Volume: 27; Issue: 14 Linguagem: Inglês
10.1364/ao.27.002815
ISSN0003-6935
AutoresRitva Keski-Kuha, John F. Osantowski, H. Herzig, Jeffrey S. Gum, Albert R. Toft,
Tópico(s)Surface Roughness and Optical Measurements
ResumoGet PDF Email Share Share with Facebook Tweet This Post on reddit Share with LinkedIn Add to CiteULike Add to Mendeley Add to BibSonomy Get Citation Copy Citation Text Ritva A. M. Keski-Kuha, John F. Osantowski, Howard Herzig, Jeffrey S. Gum, and Albert R. Toft, "Normal incidence reflectance of ion beam deposited SiC films in the EUV," Appl. Opt. 27, 2815-2816 (1988) Export Citation BibTex Endnote (RIS) HTML Plain Text Citation alert Save article
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