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Automatic mask alignment in the theta direction using moire sensors

1995; IOP Publishing; Volume: 6; Issue: 4 Linguagem: Inglês

10.1088/0957-4484/6/4/005

1361-6528

J Liu, Hideo Furuhashi, A. Torii, Rajni Sharma, V.T. Chitnis, B.P. Singh, Junko Yamada, Yoshiaki Uchida,

Adaptive optics and wavefront sensing

Automatic mask alignment in the theta direction using moire sensors is reported. The relation between small angular displacement and linear displacement is clarified. A computer-controlled angular alignment system is developed. A desired alignment position is easily set by a computer. In our experimental condition, angular accuracy of the order of 14*10-7 rad is realized by automatic computer control.