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A vibrating cantilever magnetic-field sensor

1989; Elsevier BV; Volume: 16; Issue: 3 Linguagem: Inglês

10.1016/0250-6874(89)87001-5

1873-3050

Robert E. Hetrick,

Sensor Technology and Measurement Systems

Abstract A magnetic-field sensor is described in which a planar coil, photolithographically fabricated on a silicon cantilever blade, is caused to vibrate at a resonance frequency of the blade using a piezoelectric driver. In the presence of a magnetic field, an e.m.f. is induced in the coil proportional to the field strength. Operation is analogous to that of an a.c. generator. A reciprocal device, analogous to an a.c. motor, is also possible in which an a.c. current in the coil results in a vibration of the blade with amplitude proportional to the magnetic field and a corresponding output from the piezoelectric element. Applications, required electronics and advantages of this method are discussed.