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Metal electrodes in plastic microfluidic systems

2009; Elsevier BV; Volume: 86; Issue: 4-6 Linguagem: Inglês

10.1016/j.mee.2009.01.001

1873-5568

Walter Schrott, Miloš Svoboda, Zdeněk Slouka, Dalimil Šnita,

Microfluidic and Bio-sensing Technologies

We have developed a novel technique for fabrication of plastic microfluidic systems with integrated metal microelectrodes. This technique includes: (i) optical lithography in the ma-P1275 photoresist previously coated on a metal substrate, (ii) electroplating of gold or copper, (iii) photoresist stripping, (iv) embedding of the metal structures in the UV curable resin Acrifix 192®, (v) UV curing of the resin, (vi) removal of the metal substrate – by peeling off or etching, and (vii) thermal bonding of the embedded electrodes to a mate with fluidic structures. Relatively high thickness of the metal structures built-in in the curable resin provides for a high mechanical stability of such structures. The fabrication procedure was successfully tested in the fabrication of microfluidic devices for three different applications: (i) an electrochemical microfluidic system called "electrolyte diode", (ii) A microfluidic system with an embedded cation exchange membrane, and (iii) AC and DC electroosmotic micropumps with arrays of metal electrodes.