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17 μm pixel 640 x 480 microbolometer FPA development at BAE Systems

2007; SPIE; Volume: 6542; Linguagem: Inglês

10.1117/12.723474

1996-756X

Richard J. Blackwell, Tuyet Bach, Dan O'Donnell, Jeannie Geneczko, M. D. Joswick,

Transition Metal Oxide Nanomaterials

BAE Systems has developed an advanced 640 x 480 focal plane array (FPA) with a 17 &mgr;m pixel pitch. Sensitivity of ≤ 50 mK was demonstrated and the FPAs were used in imaging demonstrations. Successful scaling of BAE Systems' patented single contact per pixel, single-level microbolometer process to 17 &mgr;m pitch provides a path toward next generation microbolometer imaging systems.