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Fabrication of sub-20 nm nanopore arrays in membranes with embedded metal electrodes at wafer scales

2014; Royal Society of Chemistry; Volume: 6; Issue: 15 Linguagem: Inglês

10.1039/c3nr06723h

2040-3372

Jingwei Bai, Deqiang Wang, Sung-Wook Nam, Hongbo Peng, Robert L. Bruce, L.M. Gignac, Markus Brink, E. Kratschmer, S. M. Rossnagel, Phil Waggoner, Kathleen B. Reuter, Chao Wang, Yann Astier, Venkatachalapathy S. K. Balagurusamy, Binquan Luan, Young Kwark, Eric Joseph, Mike Guillorn, S. Polonsky, Ajay K. Royyuru, Satyavolu S. Papa Rao, Gustavo Stolovitzky,

Advancements in Semiconductor Devices and Circuit Design

We present the fabrication of sub-20 nm nanopores and nanopore arrays in membranes with embedded multilayer electrodes using CMOS semiconductor processes.