Microstructure, mechanical and tribological behavior of MoNx/SiNx multilayer coatings prepared by magnetron sputtering
2013; Elsevier BV; Volume: 274; Linguagem: Inglês
10.1016/j.apsusc.2013.03.021
ISSN1873-5584
AutoresGuojun Zhang, Tianxiang Fan, Tao Wang, Hailin Chen,
Tópico(s)Boron and Carbon Nanomaterials Research
ResumoMoNx/SiNx multilayer coatings and MoNx coating were prepared with direct current magnetron sputtering system. The coatings were characterized by X-ray diffraction, transmission electron microscopy, nano-indentation and pin on disk tribotester. The X-ray diffraction and transmission electron microscopy results demonstrated, that phase of multilayer coatings were composed of γ-Mo2N and amorphous SiNx. The MoNx coating showed higher microhardness of about 29 GPa than MoNx/SiNx multilayers about 27 GPa. The MoNx/SiNx multilayers show better tribological properties with lower friction coefficient of about 0.53 and higher wear resistance. The wear resistance of MoNx/SiNx multilayers was reduced with the microstructure change from crystalline to amorphous.
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