Structure of diamond and diamond like carbon thin films grown by hot-filament chemical vapour deposition technique
1996; Springer Science+Business Media; Volume: 19; Issue: 3 Linguagem: Inglês
10.1007/bf02744818
ISSN0973-7669
AutoresNita Dilawar, Somna Sah, B. R. Mehta, V. D. Vankar,
Tópico(s)High-pressure geophysics and materials
ResumoMicro-crystalline diamond (MCD) and diamond like carbon (DLC) thin films were deposited on silicon (100) substrates by hot-filament CVD process using a mixture of CH4 and H2 gases at substrate temperature between 400–800°C. The microstructure of the films were studied by X-ray diffraction and scanning electron microscopy. The low temperature deposited films were found to have a mixture of amorphous and crystalline phases. At high temperatures (> 750°C) only crystalline diamond phase was obtained. Scanning electron micrographs showed faceted microcrystals of sizes up to 2µm with fairly uniform size distribution. The structure of DLC films was studied by spectroscopic ellipsometry technique. An estimate of the amount of carbon bonds existing insp 2 andsp 3 form was obtained by a specially developed modelling technique. The typical values ofsp 3/sp 2 ratio in our films are between 1·88–8·02.
Referência(s)