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Integrated high-quality factor silicon-on-sapphire ring resonators for the mid-infrared

2013; American Institute of Physics; Volume: 102; Issue: 5 Linguagem: Inglês

10.1063/1.4791558

1520-8842

Raji Shankar, İrfan Bulu, Marko Lončar,

Advanced Fiber Optic Sensors

We demonstrate high-quality (Q) factor grating-coupled ring resonators in a silicon-on-sapphire platform, operating at wavelengths between 4.3 and 4.6 μm. Total Q-factors of 151 000 and intrinsic Q-factors of 278 000 are measured, representing the highest Q-factors measured at the mid-infrared in Si.