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Esca microscope — a new approach for imaging in XPS

1987; Elsevier BV; Volume: 42; Issue: 4 Linguagem: Inglês

10.1016/0368-2048(87)80047-6

1873-2526

Graham C. Smith, M. P. Seah,

Advanced Electron Microscopy Techniques and Applications

This work demonstrates the feasibility of a novel yet simple method of obtaining XPS images using a conventional X-ray photoelectron spectrometer with a minimum of modification. A spherical sector electron energy analyser is operated in the selected area mode (small input aperture, moderate lens magnification) and deflection plates are introduced between the input lens and the sample, allowing the virtual image of the input aperture to be raster-scanned across the sample surface. The image is then formed by using the customary spectrometer output to z-modulate a synchronously raster-scanned video monitor. At present, the resolution is 150 μ but improvements to 10 μ should eventually be possible. Examples are given of studies on electronic components with insulating and conducting areas.