Characterization of a permanent magnet electron cyclotron resonance plasma source
1991; American Institute of Physics; Volume: 9; Issue: 1 Linguagem: Inglês
10.1116/1.585785
ISSN1520-8567
Autores Tópico(s)Plasma Diagnostics and Applications
ResumoExperimental details and results are presented for a permanent magnet electron cyclotron resonance plasma source matched to a multipolar confined process chamber. A Nd–Fe–B magnet structure provides a resonant axial magnetic field with no electrical or cooling input power, replacing the more typical current driven coils. Plasma parameter and etch characterization measurements in Ar and SF6 are presented for the pressure range 0.1–1.0 mTorr and input microwave power levels 100–500 W.
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