Dual source atmospheric pressure chemical vapour deposition of TiP films on glass using TiCl4 and PH2But
2001; Royal Society of Chemistry; Volume: 11; Issue: 10 Linguagem: Inglês
10.1039/b105140g
ISSN1364-5501
AutoresChristopher S. Blackman, Claire J. Carmalt, Shane A. O’Neill, Ivan P. Parkin, Leonardo Apostilco, K.C. Molloy,
Tópico(s)Advanced Materials Characterization Techniques
ResumoA facile new method for the preparation of large area titanium phosphide films on glass is described from the atmospheric pressure chemical vapour deposition of titanium tetrachloride and tert-butylphosphine.
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