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Corrected electrostatic lens systems for ion beams

1981; Elsevier BV; Volume: 191; Issue: 1-3 Linguagem: Inglês

10.1016/0029-554x(81)91004-1

1872-9606

R.L. Dalglish,

X-ray Spectroscopy and Fluorescence Analysis

Recent work in our laboratory has introduced a new class of electrostatic focus forming element for beams, the ELCO lens. It compares favourably with the electrostatic and magnetic quadrupole elements conventionally used for microbeam formation. The ELCO lens does however have disadvantages associated with apertures and alignment. We have continued with the development of ion beam lenses and have evolved a further class of lens elements which eliminates aperture and alignment problems. This new element can be combined like optical lenses into an aberration corrected system. Experimental measurement on the basic lens element has confirmed mathematical analysis of ion trajectories through the element. This mathematical analysis predicts that the basic element can be combined into a corrected lens system for, either: (1)high resolution microprobe formation with intrinsic rastering ability, the spot size limited only by the beam properties; or (2)high quality image formation with large magnification/demagnification ratio and wide angular aperture.