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Self-aligned cantilever positioning for on-substrate measurements using DVD pickup head

2009; Elsevier BV; Volume: 87; Issue: 5-8 Linguagem: Inglês

10.1016/j.mee.2009.12.064

1873-5568

Filippo Bosco, En‐Te Hwu, Stephan Sylvest Keller, Anders Greve, Anja Boisen,

Photonic and Optical Devices

In this paper, we present a novel approach for measuring the resonant frequency of cantilevers fabricated in polymeric materials. We re-designed the use of a commercial DVD-ROM pickup head and combine it with a glass-polymer substrate in order to obtain a light and portable device to measure the resonant frequency of polymer cantilevers. The use of the Pyrex-SU-8 clamping substrate allows an easy replacement of the cantilever chips and a fast alignment process to the DVD-ROM laser beam. We show measurements of thermal noise for SU-8 and TOPAS cantilevers in air and liquid environment.