Synthesis of Nano-Crystalline Diamond Film in Hot Filament Chemical Vapour Deposition by Adding Ar
2001; Institute of Physics; Volume: 18; Issue: 2 Linguagem: Inglês
10.1088/0256-307x/18/2/345
ISSN1741-3540
AutoresZhang Yufeng, Fan Zhang, GAO QIAO-JUN, YU Da-peng, Peng Xiao-Fu, Lin Zeng-Dong,
Tópico(s)Metal and Thin Film Mechanics
ResumoNano-crystalline diamond films are successfully deposited on silicon substrates via the hot filament chemical vapour deposition process using a CH4/H2/Ar gas mixture. The as-grown films are analysed by using field emission scanning electron microscopy, micro-Raman spectroscopy and x-ray diffraction. These results show that the films consist of nano-diamond grains with sizes ranging from 10 to 100 nm, and argon is an important element in the formation of nano-crystalline diamonds.
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