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High-sensitivity nanometer-scale infrared spectroscopy using a contact mode microcantilever with an internal resonator paddle

2010; IOP Publishing; Volume: 21; Issue: 18 Linguagem: Inglês

10.1088/0957-4484/21/18/185705

1361-6528

K. Kjoller, Jonathan R. Felts, Daniel Cook, Craig Prater, William P. King,

Photonic and Optical Devices

Infrared (IR) spectroscopy is one of the most widely used techniques for identifying and characterizing materials, but is diffraction limited to a spatial resolution of no smaller than several micrometers. This paper reports IR spectroscopy with 100 nm spatial resolution, using a tunable laser whose absorption in an organic layer is measured via atomic force microscopy. Wavelength-dependent absorption in the sample results in local thermomechanical deformation, which is sensed using the sharp tip of a resonant atomic force microscope cantilever. We introduce a cantilever and system design capable of 100 nm spatial resolution and a 6 × sensitivity improvement over previous approaches.