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Nanometer-scale displacement sensor based on phase-sensitive diffraction grating

2011; Optica Publishing Group; Volume: 50; Issue: 10 Linguagem: Inglês

10.1364/ao.50.001413

0003-6935

Shuangshuang Zhao, Changlun Hou, Jian Bai, Guoguang Yang, Feng Tian,

Advanced Measurement and Metrology Techniques

In this paper, a nanometer-scale displacement sensor based on a phase-sensitive diffraction grating with interferometeric detection is described and experimentally demonstrated. The proposed displacement sensor consists of a coherent light source, a microstepping motor controller, an integrated grating, a mirror, and a differential circuit. Experimental results show that the displacement sensor has a sensitivity of about 6 mV/nm and a resolution of less than 1 nm. This displacement measurement is an attractive technology with high sensitivity, broad dynamic range, good reliability, and immunity to electromagnetic interference.