In situ auger electron spectroscopy applied to the study of chemisorption and diffusion during reactive implantation of titanium into iron
1986; Elsevier BV; Volume: 25; Issue: 4 Linguagem: Inglês
10.1016/0169-4332(86)90081-4
ISSN1873-5584
AutoresD. A. Baldwin, B.D. Sartwell, I. L. Singer,
Tópico(s)Advanced Materials Characterization Techniques
ResumoAuger electron spectroscopy (AES) has been used to monitor the composition of Fe and FeTi surfaces, in situ, during Ti, Fe and Ar ion implantation in the presence of CO, C2H2, CH4, N2 and NH3 gases at pressures of approximately 10-6 Torr. Implantation-induced subsurface carburization was observed for Ti+ implantation into Fe in CO and C2H2 and for Ar+ implantation into an FeTi alloy in CO. In these cases, Ti carbide-like bonding of carbon at the surface preceded the subsurface carburization. Carburization was not observed when CH4 gas was present during Ti implantation of Fe nor was it observed when CO gas was present during Fe self-implantation. Subsurface nitridation, similar to but not exactly analogous to the carburization, occurred during Ti+ implantation of Fe with NH3 gas present. Nitridation did not occur with N2 gas present even though some nitrogen was adsorbed. The influences of surface chemical reactions are considered, along with other chemical and physical arguments, in proposing an interpretation of these results.
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