Microflow devices and systems
1994; IOP Publishing; Volume: 4; Issue: 4 Linguagem: Inglês
10.1088/0960-1317/4/4/001
ISSN1361-6439
AutoresSunao Shoji, Masayoshi Esashi,
Tópico(s)Electrowetting and Microfluidic Technologies
ResumoMicroflow devices including microvalves, micropumps and microflow sensors fabricated by micromachining are reviewed from the point of view of the actuating principle and structures. Integration of microflow control devices and microflow sensors allowed very precise control of small flow. High performance liquid dosing microsystems and sophisticated chemical analysing microsystems were demonstrated by the combination of microflow devices and microsensors. Applications of microflow devices and systems are also introduced.
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