Optical and mechanical properties of amorphous CN films
1997; Elsevier BV; Volume: 308-309; Linguagem: Inglês
10.1016/s0040-6090(97)00382-9
ISSN1879-2731
AutoresSoonil Lee, Sung Jin Park, Soo-ghee Oh, Won Mok Kim, Jang Hwan Bae, Byung‐ki Cheong, Soon Gwang Kim,
Tópico(s)High-pressure geophysics and materials
ResumoCarbon nitride (CN) films were synthesized on silicon substrates by a combined ion-beam and laser-ablation method, and the variations of the structure, and the optical and the mechanical properties of the CN films were investigated as a function of ion-beam current. All the CN films were amorphous independent of the ion-beam current, and their refractive indices, extinction coefficients and optical band gaps exhibited a significant dependence on synthesis condition. In particular, the decrease of the refractive indices and the shrinkage of the optical band gap are noticeable as the ion-beam current increases. Also, the hardness of the CN films was found to decrease with ion-beam current. The observed variations of optical and mechanical properties are attributed to the changes of the atomic bonding structures which were induced by nitrogen incorporation; reduced interlinking of sp2 clusters, increase in the number and size of sp2 clusters, and increase of structural order in sp2 clusters.
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