Operational characteristic of a compact microwave ion source
1986; Elsevier BV; Volume: 36; Issue: 11-12 Linguagem: Inglês
10.1016/0042-207x(86)90129-6
ISSN1879-2715
Autores Tópico(s)Gyrotron and Vacuum Electronics Research
ResumoA small microwave ion source has been fabricated from a quartz tube with one end enclosed by a two-grid accelerator. The source is also enclosed by a cavity operated at a frequency of 2.45 GHz. Microwave power as high as 500 W can be coupled to the source plasma. The source has been operated with different geometries and for various gases in a cw mode. For hydrogen, ion current density of 200 mA cm−2 with atomic ion species concentration as high as 80% has been extracted from the source. It has also been demonstrated that low energy oxygen ion beams (5–10 eV) can also be extracted from the source.
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