Infrared vision using uncooled micro-optomechanical camera
1999; American Institute of Physics; Volume: 74; Issue: 23 Linguagem: Inglês
10.1063/1.124163
ISSN1520-8842
AutoresT. Perazzo, M. Y. Mao, Ohmyoung Kwon, Arun Majumdar, J. B. Varesi, P.R. Norton,
Tópico(s)CCD and CMOS Imaging Sensors
ResumoThis letter presents the design, fabrication, and imaging results of an uncooled infrared (IR) camera that contains a focal plane array of bimaterial microcantilever sensors, and an optical readout technique that measures cantilever deflections in the nanometer range to directly project a visible image of the IR scene on the human eye or a visible camera. The results suggest that objects at temperatures as low as 100 °C can be imaged with the best noise-equivalent temperature difference (NEΔT) in the range of 10 K. It is estimated that further improvements that are currently being pursued can improve NEΔT to about 50 mK.
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