Microstructuring of silicon with femtosecond laser pulses
1998; American Institute of Physics; Volume: 73; Issue: 12 Linguagem: Inglês
10.1063/1.122241
ISSN1520-8842
AutoresTsing-Hua Her, Richard Finlay, Claudia Wu, Shrenik Deliwala, Eric Mazur,
Tópico(s)Nonlinear Optical Materials Studies
ResumoWe report that silicon surfaces develop an array of sharp conical spikes when irradiated with 500 laser pulses of 100-fs duration, 10-kJ/m2 fluence in 500-Torr SF6 or Cl2. The spikes are up to 40-μm tall, and taper to about 1-μm diam at the tip. Irradiation of silicon surfaces in N2, Ne, or vacuum creates structured surfaces, but does not create sharp conical spikes.
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