Enhanced piezoelectric response from barium strontium titanate multilayer films
2008; American Institute of Physics; Volume: 92; Issue: 1 Linguagem: Inglês
10.1063/1.2825287
ISSN1520-8842
AutoresR. Nath, Shan Zhong, S. P. Alpay, Bryan D. Huey, M. W. Cole,
Tópico(s)Advanced MEMS and NEMS Technologies
ResumoMultilayered and homogeneous thin films of BaxSr1−xTiO3 (BST) were grown on Pt-coated Si substrates via metal-organic solution deposition. The multilayer 220nm thick BST heterostructure consisted of Ba0.60Sr0.40TiO3, Ba0.75Sr0.25TiO3, and Ba0.90Sr0.10TiO3. A single composition 220nm thick Ba0.60Sr0.40TiO3 was also grown for comparison. The piezoelectric properties were measured using piezoresponse force microscopy. There is approximately a 50% improvement in the piezoelectric response of the multilayered heterostructure compared to the homogeneous sample, with some spatial inhomogeneity. This enhancement can be attributed to the internal potential that arises from the polarization gradient and the commensurate built-in strain in the multilayer sample.
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