Growth and trends in Auger-electron spectroscopy and x-ray photoelectron spectroscopy for surface analysis
2003; American Institute of Physics; Volume: 21; Issue: 5 Linguagem: Inglês
10.1116/1.1599862
ISSN1520-8559
Autores Tópico(s)Ion-surface interactions and analysis
ResumoA perspective is given of the development and use of surface analysis, primarily by Auger-electron spectroscopy (AES) and x-ray photoelectron spectroscopy (XPS), for solving scientific and technological problems. Information is presented on growth and trends in instrumental capabilities, instrumental measurements with reduced uncertainties, knowledge of surface sensitivity, and knowledge and effects of sample morphology. Available analytical resources are described for AES, XPS, and secondary-ion mass spectrometry. Finally, the role of the American Vacuum Society in stimulating improved surface analyses is discussed.
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