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Artigo Revisado por pares
BIBTEX RIS

Growth of hydrogenated amorphous silicon carbide films from hydrocarbon gas of methane series mixed with silane and their properties

1983; Elsevier BV; Volume: 59-60; Linguagem: Inglês

10.1016/0022-3093(83)90643-9

ISSN

1873-4812

Autores

Shugo Nitta, Akitsugu Hatano, Mayu Yamada, M. Watanabe, Masato Kawai,

Tópico(s)

Diamond and Carbon-based Materials Research

Referência(s)