Relationship between electron sensitivity and chemical structures of polymers as EB resists. II. Acetalized polyvinyl alcohol as new negative EB resists
1983; Wiley; Volume: 28; Issue: 7 Linguagem: Inglês
10.1002/app.1983.070280726
ISSN1097-4628
AutoresNaoya Ogata, Kohei Sanui, Kiyoshi Oguchi, Tomihiro Nakada, Yoichi Takahashi,
Tópico(s)Copper Interconnects and Reliability
ResumoJournal of Applied Polymer ScienceVolume 28, Issue 7 p. 2433-2437 NoteFree Access Relationship between electron sensitivity and chemical structures of polymers as EB resists. II. Acetalized polyvinyl alcohol as new negative EB resists Naoya Ogata, Naoya Ogata Faculty of Science and Technology, Sophia University 7-1 Kioi-cho, Chiyoda-ku, Tokyo 102, JapanSearch for more papers by this authorKohei Sanui, Kohei Sanui Faculty of Science and Technology, Sophia University 7-1 Kioi-cho, Chiyoda-ku, Tokyo 102, JapanSearch for more papers by this authorKiyoshi Oguchi, Kiyoshi Oguchi Faculty of Science and Technology, Sophia University 7-1 Kioi-cho, Chiyoda-ku, Tokyo 102, JapanSearch for more papers by this authorTomihiro Nakada, Tomihiro Nakada Dai Nippon Printing Co. Ltd., 1500 Fukuoka Kamifukuoka-shi Saitama 356, JapanSearch for more papers by this authorYoichi Takahashi, Yoichi Takahashi Dai Nippon Printing Co. Ltd., 1500 Fukuoka Kamifukuoka-shi Saitama 356, JapanSearch for more papers by this author Naoya Ogata, Naoya Ogata Faculty of Science and Technology, Sophia University 7-1 Kioi-cho, Chiyoda-ku, Tokyo 102, JapanSearch for more papers by this authorKohei Sanui, Kohei Sanui Faculty of Science and Technology, Sophia University 7-1 Kioi-cho, Chiyoda-ku, Tokyo 102, JapanSearch for more papers by this authorKiyoshi Oguchi, Kiyoshi Oguchi Faculty of Science and Technology, Sophia University 7-1 Kioi-cho, Chiyoda-ku, Tokyo 102, JapanSearch for more papers by this authorTomihiro Nakada, Tomihiro Nakada Dai Nippon Printing Co. Ltd., 1500 Fukuoka Kamifukuoka-shi Saitama 356, JapanSearch for more papers by this authorYoichi Takahashi, Yoichi Takahashi Dai Nippon Printing Co. Ltd., 1500 Fukuoka Kamifukuoka-shi Saitama 356, JapanSearch for more papers by this author First published: July 1983 https://doi.org/10.1002/app.1983.070280726Citations: 5AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onFacebookTwitterLinked InRedditWechat Citing Literature Volume28, Issue7July 1983Pages 2433-2437 ReferencesRelatedInformation
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