Raman scattering from small particle size polycrystalline silicon
1981; Elsevier BV; Volume: 37; Issue: 12 Linguagem: Inglês
10.1016/0038-1098(81)91202-3
ISSN1879-2766
AutoresZafar Iqbal, S. Vepřek, A.P. Webb, P. Capezzuto,
Tópico(s)Glass properties and applications
ResumoRaman scattering measurements are reported on polycrystalline silicon films prepared in a hydrogen plasma at temperatures between 70 and 400°C. The spectra show several features which are correlated with X-ray diffraction measurements and assigned to crystalline and amorphous-like components.
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