Femtosecond laser ablation of gallium arsenide investigated with time-of-flight mass spectroscopy
1998; American Institute of Physics; Volume: 72; Issue: 19 Linguagem: Inglês
10.1063/1.121364
ISSN1520-8842
AutoresA. Cavalleri, K. Sokolowski-Tinten, J. Białkowski, D. von der Linde,
Tópico(s)Ocular and Laser Science Research
ResumoWe have investigated femtosecond laser-induced ablation of gallium arsenide using time-of-flight mass spectroscopy. At the ablation threshold, we estimated surface temperatures on the order of 3500 K. We observed a clear thresholdlike effect in the number of detected particles and with increasing fluence free flight desorption transforms into a collisional expansion process. Above the ablation threshold, the behavior of gallium particles can be quantitatively described through Knudsen-layer theory.
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