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Recent developments in dimensional nanometrology using AFMs

2011; IOP Publishing; Volume: 22; Issue: 12 Linguagem: Inglês

10.1088/0957-0233/22/12/122001

1361-6501

Andrew Yacoot, Ludger Koenders,

Advanced Surface Polishing Techniques

Scanning probe microscopes, in particular the atomic force microscope (AFM), have developed into sophisticated instruments that, throughout the world, are no longer used just for imaging, but for quantitative measurements. A role of the national measurement institutes has been to provide traceable metrology for these instruments. This paper presents a brief overview as to how this has been achieved, highlights the future requirements for metrology to support developments in AFM technology and describes work in progress to meet this need.