Microstructural modifications in diamond-like carbon thin films caused by high energy ion irradiation
1995; Elsevier BV; Volume: 258; Issue: 1-2 Linguagem: Inglês
10.1016/0040-6090(95)80049-2
ISSN1879-2731
AutoresHarish C. Barshilia, Somna Sah, B. R. Mehta, V. D. Vankar, D.K. Avasthi, Jaipal, Geeta Mehta,
Tópico(s)Metal and Thin Film Mechanics
ResumoThe effect of high energy (85 MeV) nickel ions on diamond-like carbon thin films, deposited by microwave discharge of acetylene and methane gases mixed with hydrogen, has been investigated. IR, Raman and spectroscopic ellipsometry studies of irradiated and as-deposited films show large changes in their microstructural features. The effects of irradiation on films prepared from acetylene-hydrogen and methane-hydrogen gas mixtures are very different. Such a behaviour is proposed to be due to the microstructural variations in the as-deposited films.
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