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Piezoelectric transducer for a hearing aid using PZT thin film

1998; Acoustical Society of America; Volume: 103; Issue: 5_Supplement Linguagem: Inglês

10.1121/1.421745

1520-9024

Hidehiko Yasui, Minoru Kurosawa, Takeshi Morita, Takefumi Kanda, Toshiro Higuchi,

Tactile and Sensory Interactions

A piezoelectric transducer using a PZT thin film deposited by a hydrothermal method was fabricated for the investigation of ability for an earphone. The PZT material can produce sounds efficiently from an electrical signal. The thin film technology is suitable for the fabrication of a small transducer which is worn in the ear. Especially, the hydrothermal method has merits such as thick film fabrication and possibility of deposition on a round surface. Therefore we can design and fabricate a diaphragm for a small earphone which produces a high enough sound-pressure level for people who have an obstacle for hearing ability. The fabricated transducer had a bimorph construction. The base material was titanium foil 20-μm thick. Both sides of the titanium, PZT thin films 10-μm thick were deposited. The diameter of the transducer was 6 mm. We investigated the ability of the fabricated transducer. Displacement amplitude of the transducer was about 0.9 μm per 5 V driving voltage below the resonance frequency.