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Effect of Al Addition on Structure and Properties of Sputtered TiC Films

2007; Wiley; Volume: 4; Issue: S1 Linguagem: Inglês

10.1002/ppap.200730102

1612-8869

J. Soldán, J. Musil, P. Zeman,

Advanced ceramic materials synthesis

Plasma Processes and PolymersVolume 4, Issue S1 p. S6-S10 Full Paper Effect of Al Addition on Structure and Properties of Sputtered TiC Films Jan Soldán, Jan Soldán Department of Physics, University of West Bohemia, Univerzitní 22, 306 14 Plzeň, Czech RepublicSearch for more papers by this authorJindřich Musil, Corresponding Author Jindřich Musil [email protected] Department of Physics, University of West Bohemia, Univerzitní 22, 306 14 Plzeň, Czech RepublicDepartment of Physics, University of West Bohemia, Univerzitní 22, 306 14 Plzeň, Czech Republic. Fax: (+420) 377632201, (+420) 377632202Search for more papers by this authorPetr Zeman, Petr Zeman Department of Physics, University of West Bohemia, Univerzitní 22, 306 14 Plzeň, Czech RepublicSearch for more papers by this author Jan Soldán, Jan Soldán Department of Physics, University of West Bohemia, Univerzitní 22, 306 14 Plzeň, Czech RepublicSearch for more papers by this authorJindřich Musil, Corresponding Author Jindřich Musil [email protected] Department of Physics, University of West Bohemia, Univerzitní 22, 306 14 Plzeň, Czech RepublicDepartment of Physics, University of West Bohemia, Univerzitní 22, 306 14 Plzeň, Czech Republic. Fax: (+420) 377632201, (+420) 377632202Search for more papers by this authorPetr Zeman, Petr Zeman Department of Physics, University of West Bohemia, Univerzitní 22, 306 14 Plzeň, Czech RepublicSearch for more papers by this author First published: 24 April 2007 https://doi.org/10.1002/ppap.200730102Citations: 13Read the full textAboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat Abstract The article reports on the effect of Al addition on the structure, macrostress σ, mechanical properties and oxidation resistance of TiC-Al thin films. These films were sputtered using dc unbalanced magnetron equipped with a TiC target (purity 99.95%) fixed with an Al (99.99%) fixing ring of various inner diameters Øin. It was found that a continuous increase in Al content in the TiC-Al film results in (i) gradual change of the film structure from the crystalline TiC through X-ray amorphous TiC-Al to the crystalline Al2Ti, (ii) decrease in the compressive macrostress (σ < 0) up to its conversion to the tensile one (σ > 0), (iii) decrease in film microhardness, H and (iv) increase in its oxidation resistance. References 1 A. A. Voevodin, J. S. Zabinski, J. Mater. Sci. 1998, 33, 319. 2 W. P. Hsieh, D. Y. Wang, F. S. Shieu, J. Vac. Sci. Technol. 1999, A17, 1053. 3 B. K. Tay, Y. H. Cheng, X. Z. Ding, S. P. Lau, X. Shi, G. F. You, D. Sheeja, Diamond Relat. Mater. 2001, 10, 1082. 4 P. Zhang, B. K. Tay, C. Q. Sun, S. P. Lau, J. Vac. Sci. Technol. 2002, A20, 1390. 5 S. Zhang, X. L. Bui, Y. Fu, Thin Solid Films 2004, 467, 261. 6 H. J. Brinkman, F. Zupanic, J. Duszczyk, L. Katgerman, J. Mater. Res. 2000, 15(12), 2620. 7 P. Li, E. G. Kandalova, V. I. Nikitin, A. G. Makarenko, A. R. Luts, Z. Yanfei, Scripta Materialia 2003, 49, 699. 8 J. Soldan, J. Musil, Vacuum 2006, 81, 531. 9 H. O. Pierson, " Handbook of Refractory Carbides and Nitrides", Noyes Publications, New Jersey 1996. 10 R. Riedel, " Handbook of Ceramic Hard Materials", John Wiley & Sons, Germany 2000. 11 J. D. Wilcock, D. S. Campbell, Thin Solid Films 1969, 3, 3. 12 E. A. Brandes (Ed.), " Smithells Metals Reference Book", 6th edition, Butterworths, London 1983. 13 M. Hansen, " Constitution of Binary Alloys", McGraw-Hill Book Company, Inc.. NY 1958, p. 409. 14 J. Musil, A. J. Bell, J. Vlcek, T. Hurkmans, J. Vac. Sci. Technol. 1996, A14(4), 2247. 15 I. E. Campbell, " High-Temperature Technology", John Wiley & Sons, New York 1956, p. 121. 16 T. Z. Tsui, G. M. Pharr, W. C. Oliver, C. S. Bhatia, R. L. White, S. Anders, A. Anders, I. G. Brown, Mater. Res. Soc, Symp. Proc. 1995, 383, 447. 17 J. Musil, M. Jirout, Surf. Coat. Technol. 2006, (in press). 18 M. Jirout, J. Musil, Surf. Coat. Technol. 2006, 200, 6792. Citing Literature Volume4, IssueS1Supplement: Supplement: Tenth International Conference on Plasma Surface Engineering (PSE2006)April 2007Pages S6-S10 ReferencesRelatedInformation