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The spike formation probability in sputtering of solids under keV ion bombardment

1993; Elsevier BV; Volume: 83; Issue: 1-2 Linguagem: Inglês

10.1016/0168-583x(93)95914-q

1872-9584

I.S. Bitensky,

Mass Spectrometry Techniques and Applications

The probability of energy spike formation in a solid under keV ion bombardment is considered taking into account the straggling of primary ion energy deposition near the solid surface. Such consideration is necessary when spike effects, although occurring with low probability, mainly contribute to large cluster sputtering or biomolecule desorption. It is shown that the sputtering yield from a spike region especially in the case of low energy deposition is not determined by the energy loss alone. The results of the calculations are compared with the experimental data on biomolecule sputtering under keV ion bombardment.