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High-Speed Fabrication of Super-Resolution Near-Field Structure Read-Only Memory Master Disc using PtO x Thermal Decomposition Lithography

2006; Institute of Physics; Volume: 45; Issue: 2S Linguagem: Inglês

10.1143/jjap.45.1379

1347-4065

Kazuma Kurihara, Yuzo Yamakawa, Takayuki Shima, Takashi Nakano, Masashi Kuwahara, Junji Tominaga,

Integrated Circuits and Semiconductor Failure Analysis

We propose a new lithography technique using thermal decomposition of platinum oxide (PtOx) for high-throughput master disc fabrication. The smallest pit size was evaluated to be 50 nm using a laser wavelength of 405 nm and a numerical aperture (NA) of 0.65; hence, it is one-twelfth the optical spot size. In addition, fabrication of pits with different shapes was examined, and its effects on super-resolution near-field structure (super-RENS) disc properties were studied. The readout signal characteristic evaluated on the basis of carrier-to-noise ratio (CNR) with an elliptical pit was 7 dB larger than that of the round one. The results demonstrated that this high-throughput fabrication technique is also useful for controling the pit shape for CNR improvement of super-resolution readout.