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Ultra-Thin Silicon Nitride X-Ray Windows

2013; Institute of Electrical and Electronics Engineers; Volume: 60; Issue: 2 Linguagem: Inglês

10.1109/tns.2013.2243754

1558-1578

P.T. Törmä, H. J. Sipila, M. Mattila, Pasi Kostamo, Jari Kostamo, Esa Kostamo, Harri Lipsanen, Nick Nelms, Brian Shortt, Marcos Bavdaz, Christian Laubis,

X-ray Spectroscopy and Fluorescence Analysis

We have demonstrated the fabrication of ultra-thin Si fine grid supported silicon nitride X-ray windows. These X-ray windows exhibit unequaled transmission of soft X-rays, high strength and excellent thermal stability. Measured soft X-ray transmission performance is significantly enhanced compared to typical polymer or beryllium based X-ray window structures. A double sided grid structure is used to demonstrate the scaling of the technology to larger areas.