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Optimum Design of 3-Axis Sensor System for Vibration Measurement Using Piezoresistive type MEMS Sensor

2013; Korean Society for Noise and Vibration Engineering; Volume: 23; Issue: 12 Linguagem: Inglês

10.5050/ksnve.2013.23.12.1082

2287-5476

Sang-Yoon Seo, Dong-Myung Bae, Jong-Kyu Lee, Byeong-Keun Choi,

Advanced Algorithms and Applications

3-Axis sensor measurement system is needed for measuring ride quality of elevator. But because 3-Axis piezoelectric accelerometer is expensive. We developed 3-Axis sensor system which is suitable for measuring ride quality of elevator using cheap MEMS sensor. There are two types of MEMS sensor that are piezoresistive and capacitive type. The excellence of piezoresistive type in characteristic of frequency response and noise is confirmed compare to capacitive type as a result of this paper's experiment and reference. 3-Axis system using MEMS sensor needs MEMS's proper frequency response characteristic. Additionally noise characteristic of sensor and circuit, stiffness of assembly are needed for deciding frequency range and accuracy of amplitude.