X-ray diffraction on laterally modulated (InAs)n∕(AlAs)m short-period superlattices
2004; American Institute of Physics; Volume: 96; Issue: 9 Linguagem: Inglês
10.1063/1.1781768
ISSN1520-8850
AutoresOndřej Caha, Vlastimil Křápek, V. Holý, S. C. Moss, J. H. Li, Andrew G. Norman, A. Mascarenhas, John L. Reno, J. Stangl, M. Meduňa,
Tópico(s)Force Microscopy Techniques and Applications
ResumoLateral composition modulation in InAs∕AlAs short-period superlattices was investigated by x-ray grazing-incidence diffraction and coplanar x-ray diffraction at a “normal” wavelength and at an anomalous wavelength, for which diffraction from the (200) planes does not exhibit a chemical contrast. The experimental data were compared with theoretical simulations assuming that the interfaces consist of a periodic sequence of monoatomic steps. The displacement field in the superlattice was calculated by continuum elasticity and using a valence-force field method. From the fit of the experimental data to the theory, the lengths of individual atomic terraces were determined.
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