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A new electrostatic ion microprobe system

1980; Elsevier BV; Volume: 168; Issue: 1-3 Linguagem: Inglês

10.1016/0029-554x(80)91261-6

1878-3759

P. Krejcik, J. C. Kelly, R.L. Dalglish,

Integrated Circuits and Semiconductor Failure Analysis

Abstract A new system of electron and ion lenses suitable for high energy microprobes is described which uses an electrostatic coaxial (ELCO) field to focus charged particle beams. The configuration used enables both converging and diverging lenses to be made. Spherical aberration is minimised by the use of a doublet consisting of a diverging ELCO lens followed by a converging ELCO lens. Computations and experimental results are presented for a number of such lens systems.