Development and application of a laterally driven electromagnetic microactuator
2002; American Institute of Physics; Volume: 81; Issue: 3 Linguagem: Inglês
10.1063/1.1494462
ISSN1520-8842
AutoresJong Soo Ko, Myung Lae Lee, Dae-Sik Lee, Chang Auck Choi, Youn Tae Kim,
Tópico(s)Thermal Radiation and Cooling Technologies
ResumoA laterally driven electromagnetic microactuator (LaDEM) is introduced, and a micro-optical switch is designed and fabricated as an application. LaDEM offers parallel movement of the microactuator to the silicon substrate surface (in-plane mode). Polysilicon-on-insulator wafers and a reactive ion etching process were used to fabricate high-aspect-ratio vertical microstructures, which allowed the equipping of vertical micromirrors. A fabricated single leaf spring had a width of 1.2 μm, thickness of 16 μm, and length of 920 μm. The resistance of the fabricated leaf spring for the optical switch was 5 Ω. The deflection of the leaf spring started to profoundly increase at about 400 mA, and it showed snap-through phenomenon over that current value. Owing to the snap-through phenomenon, a large deflection of 60 μm was detected at 566 mA.
Referência(s)