Compositional structure of dual TiNO layers deposited on SUS 304 by an IBAD technique
2002; Elsevier BV; Volume: 158-159; Linguagem: Inglês
10.1016/s0257-8972(02)00309-2
ISSN1879-3347
AutoresKatsuhiro Yokota, Kazuhiro Nakamura, Tomohiko Kasuya, Susumu Tamura, Takashi Sugimoto, Katsuya Akamatsu, Kazuyoshi Nakao, Fumiyoshi Miyashita,
Tópico(s)Ion-surface interactions and analysis
ResumoAbstract Surfaces of stainless steel SUS 304 were coated with dual titanium oxynitride (TiNO) layers using a nitrogen ion beam-assisted deposition technique. The N ions were accelerated at energy of 0.5–2.0 keV with an intensity of 0.1 mA/cm 2 on the substrate surface. First, a TiNO film was deposited on substrates at 700 °C, and subsequently, another TiN film was deposited on the previous TiNO film surface at 400 °C. Hydrogen carbon nitride, CrFe, and metal carbide M 23 C 6 were produced in the near-surface region of stainless steel during the TiNO deposition at 700 °C, and three characteristic layers consisting of iron nitride, chromium nitride and nickel nitride were formed between the TiNO films deposited and the stainless steel. These characteristic layers disappeared during deposition of the TiNO layer at a temperature of 400 °C.
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