The use of sputtered ZnO piezoelectric thin films as broad-band microactuators
1997; Elsevier BV; Volume: 63; Issue: 2 Linguagem: Inglês
10.1016/s0924-4247(97)01520-3
ISSN1873-3069
AutoresDavid Jenkins, Michael J. Cunningham, G. Vélu, Denis Rémiens,
Tópico(s)Advanced Sensor and Energy Harvesting Materials
ResumoAn actuation system is described which utilizes a single active ZnO piezoelectric thin film deposited onto a silicon cantilever. The method for obtaining films for effective actuation by r.f. magnetron sputtering is discussed. The actuator has been incorporated into a system which enables unwanted vibrations of the cantilever to be cancelled, whilst maintaining the ability simultaneously to deflect the cantilever as required.
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