Structure and properties of (Ti1−xCrx)N coatings produced by the ion-plating method
2001; Elsevier BV; Volume: 385; Issue: 1-2 Linguagem: Inglês
10.1016/s0040-6090(00)01911-8
ISSN1879-2731
AutoresK.H Lee, C.H Park, Y S Yoon, J.J Lee,
Tópico(s)Semiconductor materials and devices
Resumo(Ti1−xCrx)N coatings were deposited by an ion-plating technique in a reactor with two evaporation sources, Ti and Cr, which were evaporated by electron beam and resistance heating, respectively. The Ti and Cr concentrations in the coating were controlled by the Ti/Cr evaporation ratio, and the (Ti1−xCrx)N coatings formed solid solutions over the entire concentration range. The coating hardness increased with increasing Cr concentration (x) and showed a maximum value of 6000 HK at x=0.8. The (Ti1−xCrx)N coatings showed compressive residual stress, which increased with increasing Cr content. The adhesion properties of the (Ti1−xCrx)N coatings were also found to be acceptable for industrial applications.
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