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A Proven, Industrial Magnetron Sputtering System With Excellent Expansion And Scale-Up Capabilities

1987; SPIE; Volume: 0823; Linguagem: Inglês

10.1117/12.941863

1996-756X

Dennis E. Griffin,

Acoustic Wave Resonator Technologies

Airco Solar Products began as a business unit of Airco Temescal in the early 1970's. The first large area magnetron sputtering deposition occurred in 1974, and the first large area magnetron sputtering system was built and operated under contract to Guardian Industries in Carleton, Michigan in 1977, and was later sold to Guardian. This system continues in three-shift production today. A smaller development system, designed for use in the architectural glass coating industry, was introduced in parallel with the large area coaters. There are now over seventeen of these systems, called the ILS-1600, in use or on order throughout the world. This is a proven, industrial-style development sputter deposition system and has an excellent field record in the areas of versatility and low maintenance requirements. Airco Solar Products has recently begun to market this system into other applications such as the photovoltaics industry, the flat panel display industry and other specialty industries. The features of this system such as overall design, expandability, process scale-up and available options will be discussed. Expanded versions of this system currently in the field will be reviewed, and future applications will be discussed.